Product Overview
The SX-PGABC Series is a high-purity mechanical pressure gauge designed for semiconductor, photovoltaic, biopharmaceutical, food-processing, and specialty-gas applications. The gauge features all 316L stainless-steel welded construction, specially treated wetted surfaces, and optional high-purity process connections. Electrical contact options are available for single- or dual-contact switching outputs. BA and EP internal surface finishes are available to support clean-process pressure measurement
requirements
Main Features
-
Electropolished wetted surfaces
-
100% helium leak tested; leak rate ≤ 10⁻⁹ kPa·L/s
-
BA Surface Finish Internal channel surface finish Ra ≤ 0.4 μm (BA grade)
-
EP Surface Finish Internal channel surface finish Ra ≤ 0.25 μm (EP grade)
-
Cleanroom vacuum-sealed packaging
Product Application
Industries Served
|
Gaseous, liquid, or corrosive media
requiring high-purity and high-cleanliness
measurement
|
Semiconductor wafer & photovoltaic
panel processing — ultra-pure gas
pressure measurement
|
Biopharmaceutical technology, gene
technology, and related industry pressure
measuremen
|
Technical Data
| Measurement | |
| Measurement Type | High-purity mechanical pressure measurement |
| Measuring Range | −0.1 MPa to 100 MPa; standard selectable ranges from vacuum to 20 MPa |
| Dial Diameter | 40 mm (1.5 in) / 50 mm (2 in) |
| Mounting Orientation | Radial / Axial |
| Accuracy | |
| Accuracy Class | Grade B for 40 mm dial; Grade A for 50 mm dial, per ASME B40.1 |
| Cleanliness & Surface Finish | |
| Cleanliness Level | Compliant with SEMI clean-process requirements |
| BA Surface Finish | Internal surface roughness Ra ≤ 0.4 μm |
| EP Surface Finish | Internal surface roughness Ra ≤ 0.25 μm |
| Leak Test | 100% helium leak tested; leak rate ≤ 10⁻⁹ kPa·L/s |
| Packaging | Cleanroom vacuum-sealed packaging |
| Environmental Conditions | |
| Ingress Protection | IP54 (IEC 60529) |
| Process Connection & Materials | |
| Process Connection | 9/16"-18 UNF male or female / W-Seal / C-Seal / optional high-purity connections |
| Connection Material | 316L stainless steel |
| Wetted Materials | All-316L stainless steel welded construction |
| Wetted Surface Treatment | 100% special treatment on all wetted surfaces |
| Output Options | |
| Switching Output | Single-contact / Dual-contact / PNP contact output (optional) |
Certifications & Compliance
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